Maniraman, P. and Chitra, L. (2014) Comparitive Analysis of Capacitive type MEMS Pressure Sensor for Altitude Sensing. 2014 IEEE NATIONAL CONFERENCE ON EMERGING TRENDS IN NEW & RENEWABLE ENERGY SOURCES AND ENERGY MANAGEMENT (NCET NRES EM). pp. 195-199.
Full text not available from this repository.Abstract
This paper reports on comparison, selection, design and simulation of various types of MEMS based capacitive type pressure sensor for altitude measurement. The widely used capacitive type pressure sensor is analyzed by simulating its diaphragm deflection, capacitance change etc. for a pressure range of 0-1.1 MPa (Mega Pascal) and its merits and demerits are discussed. Also a new design is proposed to overcome the demerits of capacitive sensor.
| Item Type: | Article |
|---|---|
| Uncontrolled Keywords: | Capacitive pressure sensor, Comb drive pressure sensor, MEMS pressure sensor, Micro sensor, MEMS Altimeter |
| Depositing User: | Unnamed user with email techsupport@mosys.org |
| Last Modified: | 06 Feb 2026 06:51 |
| URI: | https://ir.vmrfdu.edu.in/id/eprint/6074 |
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